Interferometer with a wavelength-tuned diode laser for surface profilometry

Measurement Science and Technology

Volumn 9, Issue 7, 1998, Pages 1105-1110

  Abou Zeid, A ^a   Wiese, P ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Diode laser; Interferometry; Profilometry; Wavelength tuning

Indexed keywords

HELIUM NEON LASERS; SEMICONDUCTOR LASERS; SIGNAL PROCESSING; SURFACE STRUCTURE;

SURFACE PROFILOMETRY; WAVELENGTH-TUNED DIODE LASERS;

INTERFEROMETERS;

EID: 0032117665     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/7/017     Document Type: Article

References (10)

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