The microstructure of transparent and electrically conducting titanium nitride films

Materials Chemistry and Physics

Volumn 54, Issue 1-3, 1998, Pages 330-333

  Kiuchi, M ^a,b   Chayahara, A ^a   Tarutani, M ^b   Takai, Y ^b   Shimizu, R ^b  

^a OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Dynamic ion beam mixing; Electroconductivity; Titanium nitride; Transparency

Indexed keywords

BONDING; CRYSTAL MICROSTRUCTURE; ELECTRIC CONDUCTIVITY; IONS; MIXING; MORPHOLOGY; NUCLEATION; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; TRANSPARENCY; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILE; DYNAMIC ION BEAM MIXING;

CONDUCTIVE FILMS;

EID: 0032117347     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(98)00035-2     Document Type: Article

References (11)

1. J.L. Vossen, Phys. Thin Films 9 (1977) 1.
2. G. Haacke, Ann. Rev. Mater. Sci. 7 (1977) 73.
3. J.A. Dobrowolski, F.C. Ho, D. Menagh, R. Simpson, A. Waldorf, Appl. Opt. 26 (1987) 5204.
4. P.K. Nair, M.T.S. Nair, O.R.A. Zinger, E.A. Meyers, Thin Solid Films 239 (1994) 85.
5. S. Michizono, A. Kinbara, Y. Saito, S. Yamaguchi, S. Anami, N. Matsuda, J. Vac. Sci. Technol. A 10 (1992) 1180.
6. M. Kiuchi, A. Chayahara, Appl. Phys. Lett. 64 (1994) 1048.
7. M. Kiuchi, Nucl. Instr. Meth. Phys. Res. B 80-81 (1993) 1343.
8. M. Kiuchi, M. Tomita, K. Fujii, M. Satou, R. Shimizu, Jpn. J. Appl. Phys. 26 (1987) L938.
9. M. Tarutani, Y. Takai, R. Shimizu, Jpn. J. Appl. Phys. 31 (1992) L1305.
10. Y.W. Beag, M. Tarutani, K.Y. Min, M. Kiuchi, R. Shimizu, Jpn. J. Appl. Phys. 33 (1994) 2025.
11. JCPDS data No. 6-0642.