Run-to-run control charts with contrasts

Quality and Reliability Engineering International

Volumn 14, Issue 4, 1998, Pages 261-272

  Runger, George C ^a,b,c,d,e   Fowler, John W ^{a,c,f,g,h,i,j,k}  

^a ARIZONA STATE UNIVERSITY   (United States)

^b ASU Police Department   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

^d RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^e IBM   (United States)

^f Technical Staff in the Modeling

^g The University of Texas at Austin   (United States)

^h TEXAS A AND M UNIVERSITY   (United States)

ⁱ IIE ^*

^j IEEE

^k POMS   (Belgium)

more..

Author keywords

Average run length; Exponentially weighted moving average; Statistical process control

Indexed keywords

MATHEMATICAL MODELS; PROCESS ENGINEERING; STATISTICAL METHODS; STATISTICAL PROCESS CONTROL;

ANALYSIS OF VARIANCE (ANOVA); EXPONENTIALLY WEIGHTED MOVING AVERAGE (EWMA); RUN-TO-RUN PROCESS CONTROL;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032117293     PISSN: 07488017     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-1638(199807/08)14:4<261::AID-QRE192>3.0.CO;2-R     Document Type: Article

References (14)

1. V. Czitrom and J. E. Reece, 'Virgin versus recycled wafers for furnace qualification: is the expense justified?' in V. Czitrom and P. D. Spagon (eds), Statistical Case Studies for Industrial Process Improvement, Society for Industrial and Applied Mathematics, Philadelphia, PA, 1997, pp. 87-104.
2. R. O. Lynch and R. J. Markle, 'Understanding the nature of variability in a dry etch process', in V. Czitrom and P. D. Spagon (eds), Statistical Case Studies for Industrial Process Improvement, Society for Industrial and Applied Mathematics, Philadelphia, PA, 1997, pp. 71-86.
3. G. C. Runger, 'Control charts for a multiple stream process', IMSE Working Paper Series, Arizona State University, Tempe, AZ, 1997.
4. K. C. B. Roes and R. J. M. M. Does, 'Shewhart-type charts in nonstandard situations (with discussion)', Technometrics, 37, 15-40 (1995).
5. A. M. Hurwitz and P. D. Spagon, 'Identifying sources of variation in a wafer planarization process', in V. Czitirom and P. D. Spagon (eds), Statistical Case Studies for Industrial Process Improvement, Society for Industrial and Applied Mathematics, Philadelphia, PA, 1997, pp 105-114.
6. G. C. Runger, F. B. Alt and D. C. Montgomery, 'Controlling multiple stream processes with principal components', Int. J. Prod. Res., 34, 2991-2999 (1996).
7. C A. Lowry, W H. Woodall, C. W. Champ and S. E. Rigdon, 'A multivariate exponentially weighted moving average control chart', Technometrics, 34, 46-53 (1992).
8. S. E. Rigdon, 'A double integral equation for the average run length of a multivariate exponentially weighted moving average control chart', Statist Prob. Lett., 24, 365-373 (1995).
9. S. E. Rigdon, 'An integral equation for the in-control average run length of a multivariate exponentially weighted moving average control chart', J Statist. Comput. Simul., 52, 351-365 (1995).
10. G. C. Runger and S. S. Prabhu, 'A Markov chain model for the multivariate exponentially weighted moving averages control chart', J. Am. Statist. Assoc., 91, 1701-1706 (1996).
11. G. C. Runger and S S. Prabhu, 'Designing a multivariate EWMA control chart', J. Qual. Technol., 29, 8-15 (1996).
12. W. H. Woodall and E. V. Thomas, 'Statistical process control with several components of common cause variability'. Joint Statistical Meetings, Atlanta, GA, 1991.
13. E. Yashchin, 'Monitoring variance components', Technometrics, 36, 379-393 (1994).
14. H. H. Hotelling, 'Multivariate quality control - illustrated by the air testing of sample bombsights', in C. Eisenhart, W. W. Hastay and W. A. Wallis (eds), Techniques of Statistical Analysis, McGraw-Hill, New York, 1947.