Properties of WC films synthesized by pulsed YAG laser deposition

Materials Chemistry and Physics

Volumn 54, Issue 1-3, 1998, Pages 177-180

  Suda, Y ^a   Nakazono, T ^a   Ebihara, K ^b   Baba, K ^c   Hatada, R ^c  

^a SASEBO NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b KUMAMOTO UNIVERSITY   (Japan)

^c Technology Center of Nagasaki   (Japan)

Author keywords

Auger electron spectroscopy; Optical emission; Pulsed YAG laser; Scanning electron microscopy; Tungsten carbide; WC; X ray diffraction

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBIDES; COMPOSITION; DEPOSITION; EMISSION SPECTROSCOPY; FILM GROWTH; PHYSICAL PROPERTIES; PULSED LASER APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); TUNGSTEN CARBIDE; X RAY DIFFRACTION;

FIELD EMISSION SECONDARY ELECTRON MICROSCOPY; GLANCING ANGLE X RAY DIFFRACTION; PULSED LASER DEPOSITION;

THIN FILMS;

EID: 0032116561     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(98)00060-1     Document Type: Article

References (10)

1. T. Tanaka, S. Otani, Y. Ishizawa, J. Mater. Sci. 23 (1988) 665.
2. M. Katoh, H. Kawarada, Jpn. J. Appl. Phys. 34 (1995) 3628.
3. S. Ghaisas, J. Appl. Phys. 70 (1991) 7626.
4. S. Takatsu, J. Jpn. Inst. Met. 43 (1979) 286 [in Japanese].
5. N. Kanayama, Y. Horie, Y. Nakayama, ISIJ Int. 33 (1993) 615.
6. N.Y. Pehlivanturk, O.T. Inal, Proc, Conf. on Ion Nitriding, American Society for Metals, Cleveland, 1986, p. 179.
7. Y. Suda, T. Nakazono, K. Ebihara, K. Baba, Proc. of Joint Int. Symp. of the '96 MRS-J Conf. and the 3rd Ion Eng. Conf., Chiba, Japan, 1996.
8. Y. Suda, T. Nakazono, K. Ebihara, K. Baba, Nucl. Instr. Meth. B 121 (1997) 396.
9. Y. Suda, T. Nakazono, K. Ebihara, K. Baba, Proc. 7th ACED'94, Xi'an, 1994, p. 150.
10. Y. Suda, T. Nakazono, K. Ebihara, K. Baba, T. IEE Jpn. 115A (1995) 1263.