Morphology of AlN formed in aluminum by ion implantation

Materials Chemistry and Physics

Volumn 54, Issue 1-3, 1998, Pages 351-355

  Fukumoto, S ^a   Ando, M ^a   Tsubakino, H ^a   Terasawa, M ^a   Mitamura, T ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Aluminum; Ion implantation; Nitrogen; Transmission electron microscopy; X ray diffraction

Indexed keywords

ALUMINUM COMPOUNDS; AUGER ELECTRON SPECTROSCOPY; CALCULATIONS; COMPUTER SIMULATION; HARDNESS; ION IMPLANTATION; IONS; MORPHOLOGY; NITROGEN; SURFACES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE; GRAZING INCIDENCE X RAY DIFFRACTION ANALYSIS; ULTRA MICROHARDNESS;

ALUMINUM;

EID: 0032115124     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(98)00027-3     Document Type: Article

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