-
1
-
-
0029404059
-
-
IEEE Trans. Semiconduct. Manufact., vol. 8, pp. 402-407, Nov. 1995.
-
W. Bohmayr, A. Burenkov, J. Lorenz, H. Ryssel, and S. Selberherr, "Trajectory split method for Monte Carlo simulation of ion implantation," IEEE Trans. Semiconduct. Manufact., vol. 8, pp. 402-407, Nov. 1995.
-
"Trajectory Split Method for Monte Carlo Simulation of Ion Implantation,"
-
-
Bohmayr, W.1
Burenkov, A.2
Lorenz, J.3
Ryssel, H.4
Selberherr, S.5
-
2
-
-
0021120689
-
-
IEEE Trans. Compute r-Aided Design, vol. CAD- 3, pp. 64-71, Jan. 1984.
-
A. M. Mazzone and G. Rocca, "Three-dimensional Monte Carlo simulations-Part I: Implanted profiles for dopants in submicron devices," IEEE Trans. Compute r-Aided Design, vol. CAD-3, pp. 64-71, Jan. 1984.
-
"Three-dimensional Monte Carlo Simulations-Part I: Implanted Profiles for Dopants in Submicron Devices,"
-
-
Mazzone, A.M.1
Rocca, G.2
-
3
-
-
0029373706
-
-
IEEE Trans. Computer-Aided Design, vol. 14, pp. 1104-1114, Sept. 1995.
-
E. Strasser and S. Selberherr, "Algorithms and models for cellular based topography simulation," IEEE Trans. Computer-Aided Design, vol. 14, pp. 1104-1114, Sept. 1995.
-
"Algorithms and Models for Cellular Based Topography Simulation,"
-
-
Strasser, E.1
Selberherr, S.2
-
4
-
-
0028377543
-
-
IEEE Trans. Computer-Aided Design, vol. 13, pp. 219-230, 1994.
-
E. W. Scheckler and A. R. Neureuther, "Models and algorithms for three-dimensional topography simulation with SAMPLE-3D," IEEE Trans. Computer-Aided Design, vol. 13, pp. 219-230, 1994.
-
"Models and Algorithms for Three-dimensional Topography Simulation with SAMPLE-3D,"
-
-
Scheckler, E.W.1
Neureuther, A.R.2
-
5
-
-
33747930649
-
-
in Three-Dimensional Process Simulation, J. Lorenz, Ed. Wein, Germany: Springer, 1995, pp. 77-94.
-
M. E. Law and S. Cea, "Three-dimensional simulation of thermal processes," in Three-Dimensional Process Simulation, J. Lorenz, Ed. Wein, Germany: Springer, 1995, pp. 77-94.
-
"Three-dimensional Simulation of Thermal Processes,"
-
-
Law, M.E.1
Cea, S.2
-
6
-
-
33748015543
-
-
in Three-Dimensional Process Simulation, J. Lorenz, Ed. Wein, Germany: Springer, 1995, pp. 98-108.
-
B. Baccus, S. Bozek, V. Senez, and Z. Z. Wang, "3D process simulation at IEMN/ISEN," in Three-Dimensional Process Simulation, J. Lorenz, Ed. Wein, Germany: Springer, 1995, pp. 98-108.
-
"3D Process Simulation at IEMN/ISEN,"
-
-
Baccus, B.1
Bozek, S.2
Senez, V.3
Wang, Z.Z.4
-
7
-
-
33747952050
-
-
in Proc. Workshop Numerical Modeling of Processes and Devices for Integrated Circuits NUPAD III, Honolulu, HI, 1990, pp. 25-26.
-
P. Conti, N. Hitschfield, and W. Fitchner, "uj-An octree-based mixed element grid allocation for adatpive 3D device simulation," in Proc. Workshop Numerical Modeling of Processes and Devices for Integrated Circuits NUPAD III, Honolulu, HI, 1990, pp. 25-26.
-
"Uj-An Octree-based Mixed Element Grid Allocation for Adatpive 3D Device Simulation,"
-
-
Conti, P.1
Hitschfield, N.2
Fitchner, W.3
-
8
-
-
0027701171
-
-
IEEE Trans. Computer-Aided Design, vol. 12, pp. 1714-1725, Nov. 1993.
-
N. Hitschfeld, P. Conti, and W. Fichtner, "Mixed element trees: A generalization of modified octrees for the generations of meshes for the simulation of complex 3-D semiconductor device structures," IEEE Trans. Computer-Aided Design, vol. 12, pp. 1714-1725, Nov. 1993.
-
"Mixed Element Trees: A Generalization of Modified Octrees for the Generations of Meshes for the Simulation of Complex 3-D Semiconductor Device Structures,"
-
-
Hitschfeld, N.1
Conti, P.2
Fichtner, W.3
-
9
-
-
0001121724
-
-
SIAM J. Sci Comput., vol. 16, no. 6, pp. 1292-1307, 1995.
-
B. Joe, "Construction of three-dimensional improved-quality triangulations using local transformations," SIAM J. Sci Comput., vol. 16, no. 6, pp. 1292-1307, 1995.
-
"Construction of Three-dimensional Improved-quality Triangulations Using Local Transformations,"
-
-
Joe, B.1
-
10
-
-
85027193779
-
-
in Proc. Int. Conf. Simulation of Semiconductor Processes and Devices, Tokyo, Japan, 1996, pp. 129-130.
-
P. Fleischmann and S. Selberherr, "A new approach to fully unstructured three-dimensional delaunay mesh generation with improved element quality," in Proc. Int. Conf. Simulation of Semiconductor Processes and Devices, Tokyo, Japan, 1996, pp. 129-130.
-
"A New Approach to Fully Unstructured Three-dimensional Delaunay Mesh Generation with Improved Element Quality,"
-
-
Fleischmann, P.1
Selberherr, S.2
-
12
-
-
0001309061
-
-
SIAM J. Numer. Anal., vol. 34, no. 3, pp. 979-997, 1997.
-
R. E. Bank and R. K. Smith, "Mesh smoothing using a posteriori error estimates," SIAM J. Numer. Anal., vol. 34, no. 3, pp. 979-997, 1997.
-
"Mesh Smoothing Using A Posteriori Error Estimates,"
-
-
Bank, R.E.1
Smith, R.K.2
-
13
-
-
33747900027
-
-
The Finite Element Method, vol. 2. London, U.K.: McGraw-Hill, 1991.
-
O. C. Zienkiewicz and R. L. Taylor, Solid and Fluid Mechanics, Dynamics and Non-Linearity, 4th ed. (The Finite Element Method, vol. 2). London, U.K.: McGraw-Hill, 1991.
-
Solid and Fluid Mechanics, Dynamics and Non-Linearity, 4th ed.
-
-
Zienkiewicz, O.C.1
Taylor, R.L.2
-
14
-
-
0023288565
-
-
Int. J. Numer. Meth. Eng., vol. 24, pp. 337-357, 1987.
-
O. C. Zienkiewicz and J. Z. Zhu, "A simple error estimator and adaptive procedure for practical engineering analysis," Int. J. Numer. Meth. Eng., vol. 24, pp. 337-357, 1987.
-
"A Simple Error Estimator and Adaptive Procedure for Practical Engineering Analysis,"
-
-
Zienkiewicz, O.C.1
Zhu, J.Z.2
-
15
-
-
0024734345
-
-
Int. J. Number. Meth. Eng., vol. 28, pp. 2161-2174, 1989.
-
M. Ainsworth, J. Z. Zhu, A. W. Craig, and O. C. Zienkiewicz, "Analysis of the Zienkiewicz-Zhu a posteriori error estimator in the finite element method," Int. J. Number. Meth. Eng., vol. 28, pp. 2161-2174, 1989.
-
"Analysis of the Zienkiewicz-Zhu A Posteriori Error Estimator in the Finite Element Method,"
-
-
Ainsworth, M.1
Zhu, J.Z.2
Craig, A.W.3
Zienkiewicz, O.C.4
-
16
-
-
33747662753
-
-
SIAM J. Sci Stat. Comput., vol. 13, no. 12, pp. 631-644, 1992.
-
H. A. van der Vorst, "BI-CGSTAB: A fast and smoothly converging variant of BI-CG for the solution of nonsymmetric linear systems," SIAM J. Sci Stat. Comput., vol. 13, no. 12, pp. 631-644, 1992.
-
"BI-CGSTAB: A Fast and Smoothly Converging Variant of BI-CG for the Solution of Nonsymmetric Linear Systems,"
-
-
Van Der Vorst, H.A.1
-
17
-
-
33747995076
-
-
in Simulation of Semiconductor Devices and Processes, S. Selberherr, H. Stippel, and E. Strasser, Eds. Wien, Germany: Springer, 1993, vol. 5, pp. 85-88.
-
O. Heinreichsberger, M. Thurner, and S. Selberherr, "Practical use of a hierarchical linear solver concept for 3D MOS device simulation," in Simulation of Semiconductor Devices and Processes, S. Selberherr, H. Stippel, and E. Strasser, Eds. Wien, Germany: Springer, 1993, vol. 5, pp. 85-88.
-
"Practical Use of A Hierarchical Linear Solver Concept for 3D MOS Device Simulation,"
-
-
Heinreichsberger, O.1
Thurner, M.2
Selberherr, S.3
-
18
-
-
33747965319
-
-
in Simulation of Semiconductor Devices and Processes, H. Ryssel and P. Pichler, Eds. Wien, Germany: Springer, 1995, vol. 6, pp. 492-4195.
-
W. Bohmayr, A. Burenkov, J. Lorenz, H. Ryssel, and S. Selberherr, "Statistical accuracy and cpu time characteristic of three trajectory split methods for Monte Carlo simulation of ion implantation," in Simulation of Semiconductor Devices and Processes, H. Ryssel and P. Pichler, Eds. Wien, Germany: Springer, 1995, vol. 6, pp. 492-4195.
-
"Statistical Accuracy and Cpu Time Characteristic of Three Trajectory Split Methods for Monte Carlo Simulation of Ion Implantation,"
-
-
Bohmayr, W.1
Burenkov, A.2
Lorenz, J.3
Ryssel, H.4
Selberherr, S.5
-
19
-
-
0029393765
-
-
lEEETrans. Computer-Aided Design, vol. 14, pp. 1208-1222, Oct. 1995.
-
S. Halama, Ch. Pichler, G. Rieger, G. Schrom, T. Simlinger, and S. Selberherr, "Vista-User interface, task level, and tool integration," lEEETrans. Computer-Aided Design, vol. 14, pp. 1208-1222, Oct. 1995.
-
"Vista-User Interface, Task Level, and Tool Integration,"
-
-
Halama, S.1
Pichler, Ch.2
Rieger, G.3
Schrom, G.4
Simlinger, T.5
Selberherr, S.6
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