Length measurement using a regular crystalline lattice and a dual tunnelling unit scanning tunnelling microscope in a thermo-stabilized cell

Measurement Science and Technology

Volumn 9, Issue 7, 1998, Pages 1076-1081

  Aketagawa, Masato ^a   Takada, Koji ^a   Kobayashi, Keiko ^a   Takeshima, Nobuhito ^a   Noro, Masayoshi ^a   Nakayama, Yoshinori ^b  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CRYSTAL LATTICES; DIFFRACTION GRATINGS; GRAPHITE; MEASUREMENT ERRORS; SCANNING TUNNELING MICROSCOPY;

DUAL TUNNELING UNIT SCANNING TUNNELING MICROSCOPES (DTU STM); HIGHLY-ORIENTED PYROLYTIC GRAPHITE; LENGTH MEASUREMENT; THERMO-STABILIZED CELL;

SPATIAL VARIABLES MEASUREMENT;

EID: 0032114454     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/7/012     Document Type: Article

References (10)

1. Thalmann R and Hou W 1993 Limitations of interpolation accuracy in heterodyne interferometry Proc. 7th Int. Precision Engineering Seminar (Kobe, Japan) May 1993 ed N Ikawa et al (London: Butterworth-Heinemann) pp 11-23
2. Bowen D K, Chetwynd D G and Schwarzenberger D R 1990 Sub-nanometre displacements calibration using x-ray interferometry Meas. Sci. Technol. 1 107-19
3. Binning G, Rohrer H, Gerber C H and Weibel E 1982 Tunnelling through a controllable vacuum gap Appl. Phys. Lett. 40 178-80
4. Teague E C 1989 The National Institute of Standards and Technology molecular measuring machine project: metrology and precision engineering design J. Vac. Sci. Technol. B 7 1898-902
5. Kawakatsu H and Higuchi T 1990 A dual-tunnelling unit scanning tunnelling microscope J. Vac. Sci. Technol. B 8 319-23
6. Aketagawa M, Takada K, Suzuki S, Sasaki S and Takahashi H 1997 1 μm range comparative length measurement using a regular crystalline lattice and a dual tunnelling unit scanning tunnelling microscope J. Vac. Sci. Technol. B 15 574-8
7. Aketagawa M, Takada K, Sasaki S, Suzuki S, Kobayashi K, Yamada K and Nakayama Y 1997 Direct length comparison between regular crystalline lattice and SEM standard grating using dual tunneling unit STM Proc. 7th Int. Conf. on Metrology and Properties of Engineering Surfaces (Gothenburg, Sweden) April 1997 ed B G Rosen et al (Gothenburg: Chalmers University of Technology) pp 281-7 Aketagawa M et al 1998 Int. J. Machine Tools Manufac. at press
8. Aketagawa M, Takada K, Sasaki S, Suzuki S, Kobayashi K, Yamada K and Nakayama Y 1997 Direct length comparison between regular crystalline lattice and SEM standard grating using dual tunneling unit STM Proc. 7th Int. Conf. on Metrology and Properties of Engineering Surfaces (Gothenburg, Sweden) April 1997 ed B G Rosen et al (Gothenburg: Chalmers University of Technology) pp 281-7 Aketagawa M et al 1998 Int. J. Machine Tools Manufac. at press
9. Nakayama Y, Okazaki S and Sugimoto A 1988 Proposal for a new submicron dimension reference for a electron beam metrology system J. Vac. Sci. Technol. B 6 1930-3
10. Bryant A, Smith D P E and Quate C F 1986 Imaging in real time with tunnelling microscope Appl. Phys. Lett. 48 832-4