Multiple-angle-of-incidence ellipsometry for GaAs/GaPAs superlattices

Vacuum

Volumn 50, Issue 3-4, 1998, Pages 425-430

  Dmitruk, N L ^a   Gorea, O S ^b   Mikhailik, T A ^a   Romaniuk, V R ^a   Zabashta, L A ^c  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

^b MOLDOVA STATE UNIVERSITY   (Moldova)

^c SUMY STATE UNIVERSITY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; FILM GROWTH; INFRARED SPECTROSCOPY; INVERSE PROBLEMS; PROBLEM SOLVING; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR SUPERLATTICES; X RAY DIFFRACTION;

FAR INFRARED REFLECTION SPECTROSCOPY; MULTIPLE ANGLE OF INCIDENCE ELLIPSOMETRY;

ELLIPSOMETRY;

EID: 0032108976     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00078-5     Document Type: Article

References (8)

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