Integration risks in 300-mm wafer fab automation

Solid State Technology

Volumn 41, Issue 7, 1998, Pages 193-204

  Chrisos, John ^a   Nestel Patt, Jeff ^a  

^a PRI Automation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; MATERIALS HANDLING; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; STANDARDS;

AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS); WORK-IN-PROCESS (WIP);

FACTORY AUTOMATION;

EID: 0032108928     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (0)