Laser direct writing of tin oxide patterns

Vacuum

Volumn 50, Issue 3-4, 1998, Pages 327-329

  Szorenyi T ^a   Geretovszky, Zs ^a   Toth J ^b   Simon, A ^b   Cserhati Cs ^c  

^a RESEARCH GROUP ON LASER PHYSICS   (Hungary)

^b INSTITUTE OF NUCLEAR RESEARCH ATOMKI   (Hungary)

^c UNIVERSITY OF DEBRECEN   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; GAS LASERS; INTERFACES (MATERIALS); OXIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SOLUTIONS; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

ARGON LASER; LASER DEPOSITION; LASER DIRECT WRITING; TIN OXIDE;

LASER BEAM EFFECTS;

EID: 0032108908     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00063-3     Document Type: Article

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