Application of quadrupole mass spectrometer for the analysis of near-surface gas composition during DC sensor-tests

Vacuum

Volumn 50, Issue 3-4, 1998, Pages 331-337

  Bene, R ^a   Kiss, G ^a   Perczel, I V ^a   Meyer, F A ^b   Reti F ^a  

^a TU Institute of Building Constructions and Sanitary Engineering Budapest   (Hungary)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; CHEMICAL SENSORS; COMPOSITION; ELECTRIC RESISTANCE MEASUREMENT; ETHANOL; OXIDATION; SEMICONDUCTOR MATERIALS; STRONTIUM COMPOUNDS;

QUADRUPOLE MASS SPECTROMETER; SENSOR POLARISATION;

MASS SPECTROMETRY;

EID: 0032108552     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00062-1     Document Type: Article

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