Thermal stability of amorphous and crystalline multilayers produced by magnetron sputtering

Vacuum

Volumn 50, Issue 3-4, 1998, Pages 373-383

  Beke, D L ^a   Langer, G A ^a   Kis Varga, M ^b   Dudas, A ^a   Nemes, P ^a   Daroczi L ^a   Kerekes, Gy ^b   Erdelyi Z ^a  

^a UNIVERSITY OF DEBRECEN   (Hungary)

^b INSTITUTE OF NUCLEAR RESEARCH ATOMKI   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLINE MATERIALS; GRAIN BOUNDARIES; MAGNETRON SPUTTERING; MOLYBDENUM; MULTILAYERS; POROSITY; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; TRANSMISSION ELECTRON MICROSCOPY; VANADIUM; X RAY DIFFRACTION;

AMORPHOUS MULTILAYER; CRYSTALLINE MULTILAYER; DIFFUSIONAL STRESS;

THERMODYNAMIC STABILITY;

EID: 0032108466     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00069-4     Document Type: Article

References (15)

1. Piecuch, M. and Nevot, L., Metallic Multilayers, Materials Science Forum, 1990, 59-60, 93.
2. Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices, Vol. 234, ed. O. Auciello and J. Engemann, NATO ASI Series.
3. Metallic Multilayers, ed. A. Chamberod and J. Hillairet, Trans Tech Publications, 1990.
4. Fert, A., Metallic Multilayers, Materials Science Forum, 1990, 59-60, 439.
5. Greer, A. L., Defect and Diffusion Forum, 1995, 129-130, 163.
6. Birch, J., Hultman, L., Sundgren, J. E. and Radnoczi, G., Phys. Rev., 1996, B53, 8114.
7. Greer, A. L. and Spaepen, F., in Synthetic Modulated Structures, ed. L. Chang and B. C. Giessen, Academic Press, New York, 1986, 419.
8. Fullerton, E., Schuller, I. K., Vanderstraeten, H. and Bruynseraede, Y., Phys. Rev., 1992, B 45, 9292.
9. Schuller, I. K., Phys. Rev. Lett., 1980, 44, 1597.
10. Sevenhans, W., Gijs, M., Bruynseraede, Y., Homma, H. and Schuller, I. K., Rap. Comm, Phys. Rev., 1986, B 34, 5955.
11. Prokes, S. M. and Spaepen, F., Mater. Res. Soc., Symp. Proc., 1986, 56, 383.
12. Prokes, S. M. and Spaepen, F., Appl. Phys. Lett., 1985, 47, 234.
13. Spaepen, F., J. Magn. Magn. Mat., 1996, 156.
14. Daróczi, L., Beke, D. L., Langer, G., Radnóczi, Gy. and Czigány, Zs., J. Magn. Magn. Mat., 1996, 156, 417.
15. Nemes, P., Beke, D. L. and Erdélyi, Z., to be published.