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Volumn 10, Issue 4, 1998, Pages 60-62
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Free-standing silicon micromachined resistors from (110) substrate
a
a
Consorzio Pisa Ricerche
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(Italy)
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC RESISTANCE MEASUREMENT;
ELECTRON BEAM LITHOGRAPHY;
MAGNETORESISTANCE;
OHMIC CONTACTS;
PHOTOLITHOGRAPHY;
PLASMA ETCHING;
RESISTORS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR QUANTUM DOTS;
SEMICONDUCTOR QUANTUM WIRES;
SUBSTRATES;
THERMOOXIDATION;
QUANTUM CONFINEMENT;
QUANTUM EFFECT;
SILICON PLANES;
SUPERFICIAL DEPLETION LAYER;
SEMICONDUCTING SILICON;
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EID: 0032108366
PISSN: 11201908
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (1)
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References (8)
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