Miniature piezoelectric actuators: Design concept, fabrication and performance evaluation

Smart Materials and Structures

Volumn 7, Issue 3, 1998, Pages 312-326

  Lee, C K ^a   Chang, S H ^b   Chang, Pei Zen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRONIC EQUIPMENT MANUFACTURE; INTERFEROMETERS; LASER APPLICATIONS; MINIATURE INSTRUMENTS; SPUTTERING;

LASER DOPPLER INTERFEROMETERS; MINIATURE PIEZOELECTRIC ACTUATORS;

PIEZOELECTRIC DEVICES;

EID: 0032097321     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/7/3/007     Document Type: Article

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