The evolution of the translational energy of hydrogen atoms in a 2 MHz inductively coupled plasma deposition reactor

Journal of Physics D: Applied Physics

Volumn 31, Issue 12, 1998, Pages 1457-1464

  Andrieux, M ^a   Badie, J M ^b   Ducarroir, M ^a   Bisch, C ^a  

^a UNIVERSITÉ DE PERPIGNAN   (France)

^b Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHARGE TRANSFER; CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; DISSOCIATION; DOPPLER EFFECT; ELECTRON ENERGY LEVELS; EMISSION SPECTROSCOPY; HYDROGEN; LIGHT EMISSION; PLASMA APPLICATIONS;

INDUCTIVELY COUPLED PLASMAS (ICP); KINETIC ENERGY; TRANSLATIONAL ENERGY;

GLOW DISCHARGES;

EID: 0032097056     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/12/009     Document Type: Article

References (24)

1. Lelogeais M and Ducarroir M 1991 Thin Solid Films 197 257-67
2. Lelogeais M and Ducarroir M 1991 Surf. Coating Technol. 48 121-9
3. Agullo J M, Ducarroir M, Clemendot F and Lina A 1993 J. Physique Coll. Suppl. 8 C3 163-70
4. Andrieux M, Badie J M, Bisch C, Ducarroir M and Teyssandier F 1995 J. Physique IV, Coll. Suppl. J. Physique II 5 C5 607-14
5. Chapman B 1980 Glow Discharge Processes (New York: Wiley)
6. Reif R CVD Abstracts personal communication
7. Inspektor A K 1987 Surf. Coating Technol. 33 31-48
8. Ito K, Oda N, Hatano Y and Tsuboi T 1976 Chem. Phys. 17 35-43
9. Freund R S, Schiavone J A and Brader D F 1976 J. Chem. Phys. 64 1122-7
10. Ito K, Oda N, Hatano Y and Tsuboi T 1977 Chem. Phys. 21 203-10
11. Kurawaki J, Ueki K, Higo M and Ogawa T 1983 J. Chem. Phys. 78 3071-7
12. Ogawa T, Ihara S, Yonekura N, Yasuda T and Nakashima K 1992 Chem. Phys. 168 145-50
13. Wu K T, Menais C, Abrahim A and Oldmixon R 1993 Chem. Phys. Lett. 210 118-22
14. Barbeau C and Jolly J 1990 J. Phys. D: Appl. Phys. 23 1168-74
15. Sultan G and Baravian G 1992 J. High Temp. Chem. Proc. 1 (C3) 525-32
16. Cappelli A, Gottscho R A and Miller T A 1985 Plasma Chem. Plasma Process. 5 317-31
17. Djurovic S and Roberts J R 1993 J. Appl. Phys. 74 6558-65
18. Radovanov S B, Dzierzega K, Roberts J R and Olthoff J K 1995 Appl. Phys Lett. 66 2637-9
19. Lawler J E 1958 Phys. Rev. A 32 2977-80
20. Phelps A V 1991 J. Phys. Chem. Ref. Data 20 557-73
21. Phelps A V 1990 J. Phys. Chem. Ref. Data 19 653-75
22. Phelps A V 1992 J. Phys. Chem. Ref. Data 21 883-97
23. Phelps A V and Jelenkovic B M 1988 Phys. Rev. A 38 2975-90
24. Scott D A and Phelps A V 1991 Phys. Rev. A 43 3043-56