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Volumn 81, Issue 6, 1998, Pages 1471-1476

Microstructure of molybdenum disilicide-silicon carbide nanocomposite thin films

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CERAMIC MATERIALS; COMPOSITE MATERIALS; CRYSTALLIZATION; HIGH TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; MICROSTRUCTURE; MOLYBDENUM COMPOUNDS; NANOSTRUCTURED MATERIALS; SILICON CARBIDE; SPUTTER DEPOSITION; THIN FILMS;

EID: 0032096261     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1998.tb02505.x     Document Type: Article
Times cited : (3)

References (24)
  • 4
    • 0018112360 scopus 로고
    • Molybdenum Disilicide as a Component of Modern Composites for Application at High Temperatures
    • J. Schlichting, "Molybdenum Disilicide as a Component of Modern Composites for Application at High Temperatures," High Temp. High Pressures, 10, 241-69 (1978).
    • (1978) High Temp. High Pressures , vol.10 , pp. 241-269
    • Schlichting, J.1
  • 5
    • 0026896651 scopus 로고
    • A Comparative Overview of Molybdenum Disilicide Composites
    • A. K. Vasudevan and J. J. Petrovic, "A Comparative Overview of Molybdenum Disilicide Composites," Mater. Sci. Eng., A, A155, 1-17 (1992).
    • (1992) Mater. Sci. Eng., A , vol.A155 , pp. 1-17
    • Vasudevan, A.K.1    Petrovic, J.J.2
  • 6
    • 0028430691 scopus 로고
    • Processing of Molybdenum Disilicide
    • J. L. Jeng and E. J. Lavernia, "Processing of Molybdenum Disilicide," J. Mater. Sci., 29 [10] 2557-71 (1994).
    • (1994) J. Mater. Sci. , vol.29 , Issue.10 , pp. 2557-2571
    • Jeng, J.L.1    Lavernia, E.J.2
  • 7
    • 0024768064 scopus 로고
    • Silicide Matrix Materials for High-Temperature Applications
    • P. J. Meshter and D. S. Schwartz, "Silicide Matrix Materials for High-Temperature Applications," JOM, 41 [11] 52-55 (1989).
    • (1989) JOM , vol.41 , Issue.11 , pp. 52-55
    • Meshter, P.J.1    Schwartz, D.S.2
  • 8
    • 0019038920 scopus 로고
    • Refractory Silicides for Integrated Circuits
    • S. P. Muraka, "Refractory Silicides for Integrated Circuits," J. Vac. Sci. Technol., 17 [4] 775-92 (1980).
    • (1980) J. Vac. Sci. Technol. , vol.17 , Issue.4 , pp. 775-792
    • Muraka, S.P.1
  • 11
    • 0026811017 scopus 로고
    • On the Formation of Molybdenum Disilicide in Mo-Si Multilayers: The Effect of Mo Thickness and Annealing Temperatures
    • Y. Ijdiyaou, M. Azizam, E. L. Ameziane, M. Brunel, and T. A. Nguyentan, "On the Formation of Molybdenum Disilicide in Mo-Si Multilayers: The Effect of Mo Thickness and Annealing Temperatures," Appl. Surf. Sci., 55, 165-71 (1992).
    • (1992) Appl. Surf. Sci. , vol.55 , pp. 165-171
    • Ijdiyaou, Y.1    Azizam, M.2    Ameziane, E.L.3    Brunel, M.4    Nguyentan, T.A.5
  • 12
    • 84953675274 scopus 로고
    • Fabrication of High Reflectance Mo-Si Multilayer Mirrors by Planar Magnetron Sputtering
    • D. G. Stearns, R. S. Rosen, and S. P. Vernon, "Fabrication of High Reflectance Mo-Si Multilayer Mirrors by Planar Magnetron Sputtering," J. Vac. Sci. Technol. A, 9 [5] 2662-69 (1991).
    • (1991) J. Vac. Sci. Technol. A , vol.9 , Issue.5 , pp. 2662-2669
    • Stearns, D.G.1    Rosen, R.S.2    Vernon, S.P.3
  • 13
    • 11644288927 scopus 로고    scopus 로고
    • Oxidation and Heat Resistant Cermets, Swed. Pat. No. 155 836, 1953
    • H. H. Medin, Kanthal, "Oxidation and Heat Resistant Cermets," Swed. Pat. No. 155 836, 1953.
    • Medin, H.H.1    Kanthal2
  • 16
    • 11644299065 scopus 로고    scopus 로고
    • A Proposed Model for the Oxidation of MgO-SiC Composites
    • submitted to
    • D. J. Aldrich, M. E. F. Camey, and D. W. Readey, "A Proposed Model for the Oxidation of MgO-SiC Composites," submitted to J. Am. Ceram. Soc. (1997).
    • (1997) J. Am. Ceram. Soc.
    • Aldrich, D.J.1    Camey, M.E.F.2    Readey, D.W.3
  • 17
    • 5244338595 scopus 로고
    • Oxidation Behavior of SiC-Whisker-Reinforced Alumina-Zirconia Composites
    • M. Backhaus-Ricoult, "Oxidation Behavior of SiC-Whisker-Reinforced Alumina-Zirconia Composites," J. Am. Ceram. Soc., 74 [8] 1793-802 (1991).
    • (1991) J. Am. Ceram. Soc. , vol.74 , Issue.8 , pp. 1793-1802
    • Backhaus-Ricoult, M.1
  • 18
    • 0028671176 scopus 로고
    • Physical Vapor Deposition of Molybdenum and Silicon Thin Films
    • S. Govindarajan, J. J. Moore, B. Mishra, and D. L. Olson, "Physical Vapor Deposition of Molybdenum and Silicon Thin Films," Surf. Coat. Technol., 68/69, 45-50 (1994).
    • (1994) Surf. Coat. Technol. , vol.68-69 , pp. 45-50
    • Govindarajan, S.1    Moore, J.J.2    Mishra, B.3    Olson, D.L.4
  • 20
    • 0345417966 scopus 로고    scopus 로고
    • Reactive Synthesis of Composite Targets Used in Physical Vapor Deposition of Thin Films
    • Edited by T. S. Srivatsan and J. J. Moore. TMS, Warrendale, PA
    • S. Govindarajan, H. J. Feng, J. J. Moore, D. L. Olson, B. Mishra, and E. A. Levashov, "Reactive Synthesis of Composite Targets Used in Physical Vapor Deposition of Thin Films"; pp. 795-802 in Processing and Fabrication of Advanced Materials IV. Edited by T. S. Srivatsan and J. J. Moore. TMS, Warrendale, PA, 1996.
    • (1996) Processing and Fabrication of Advanced Materials IV , pp. 795-802
    • Govindarajan, S.1    Feng, H.J.2    Moore, J.J.3    Olson, D.L.4    Mishra, B.5    Levashov, E.A.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.