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Volumn 45, Issue 3 PART 1, 1998, Pages 626-631
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Average depths of electron penetration: use as characteristic depths of exposure
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Author keywords
[No Author keywords available]
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Indexed keywords
CALCULATIONS;
ELECTRON BEAMS;
ELECTRONS;
MATHEMATICAL MODELS;
NUMERICAL ANALYSIS;
RADIATION EFFECTS;
CHARGE DEPOSITION;
ELECTRON IRRADIATION;
ELECTRON PENETRATION;
SEMIEMPIRICAL MODEL;
SLAB;
IRRADIATION;
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EID: 0032094999
PISSN: 00189499
EISSN: None
Source Type: Journal
DOI: 10.1109/23.682461 Document Type: Article |
Times cited : (23)
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References (12)
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