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Volumn 248, Issue 1-4, 1998, Pages 79-82

On the interface strain distribution in Si-on-sapphire system

Author keywords

Sapphire; Silicon; X ray strain determination

Indexed keywords

COMPUTATIONAL METHODS; MATHEMATICAL MODELS; SAPPHIRE; SEMICONDUCTING SILICON; STRAIN MEASUREMENT; STRESS CONCENTRATION; X RAY ANALYSIS;

EID: 0032093944     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(98)00207-5     Document Type: Article
Times cited : (5)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.