Planarization of film deposition and improvement of channel structure for fabrication of anti-resonant reflecting optical waveguide type X-crossing vertical coupler filter

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 6 SUPPL. B, 1998, Pages 3713-3717

  Pan, Wugen ^a   Chu, Sai Tak ^a   Sato, Shinya ^a   Maeda, Tsuyoshi ^b   Kato, Takashi ^b   Kokubun, Yasuo ^a,b  

^a KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^b YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

ARROW; Lift off technique; Planarization of channel structure; Planarization of the refractive index and thickness; VCF

Indexed keywords

GLASS; LIGHT REFLECTION; MAGNETRON SPUTTERING; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; REFRACTIVE INDEX; SPUTTER DEPOSITION; THIN FILMS; WAVEGUIDE COUPLERS;

ANTIRESONANT REFLECTING OPTICAL WAVEGUIDE; VERTICAL COUPLER FILTER;

OPTICAL FILTERS;

EID: 0032092835     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.3713     Document Type: Article

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