Reduction of friction in a fluid driven micro-actuator using a stepped bearing plate

Journal of Micromechanics and Microengineering

Volumn 8, Issue 2, 1998, Pages 151-154

  Flockhart, S M ^a   Dhariwal, R S ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; FRICTION; PRESSURE; ROTORS; STATORS;

BEARING PLATE; FLUID DRIVE;

MICROACTUATORS;

EID: 0032091462     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/2/027     Document Type: Article

References (4)

1. Kumar S, Cho D and Carr W N 1992 Experimental study of electric suspension for microbearings J. Microelectromech. Syst. 1 23-30
2. Suzuki S, Matsuura T et al 1991 Friction and wear studies on lubricants and materials applicable to MEMS Proc. IEEE 4th Workshop on MEMS (Nara) pp 143-7
3. Fuller D D 1956 Theory and Practice of Lubrication for Engineers (New York: Wiley)
4. Shaw M C and Macks E F 1949 Analysis and Lubrication of Bearings (New York: McGraw-Hill)