Photoresist parabolas for curved micromirrors

Journal of Micromechanics and Microengineering

Volumn 8, Issue 2, 1998, Pages 108-110

  Rotich, S K ^a   Smith, J G ^a   Evans, A G R ^a   Brunnschweiler, A ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

GEOMETRICAL OPTICS; MASKS; MIRRORS; PROJECTION SYSTEMS; REFLECTIVE COATINGS; SOLAR CELLS;

MICROMIRRORS; MICROSCOPIC PARABOLIC SURFACES; STEPPER PROJECTION REDUCTION SYSTEM;

PHOTORESISTS;

EID: 0032090172     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/2/016     Document Type: Article

References (4)

1. Wagner B, Quenzer H J, Henke W, Hoppe W and Pilz W 1995 Microfabrication of complex surface topographies using gray-tone lithography Sensors Actuators A 46-47 89-94
2. Purdy D R 1994 Fabrication of complex micro-optic components using photo-sculpting through half-tone transmission masks Pure Appl. Opt. 167-75
3. Frazier A B, Ahn C H and Allen M G 1995 Development of micromachined devices using polyimide-based processes Sensors Actuators A 45 47-55
4. Gal G, Herman B, Anderson W, Shough D, Purdy D R and Berwick A 1994 Development of the dispersive microlens Pure Appl. Opt. 97-101