Secondary ion mass spectrometry for quantitative surface and in-depth analysis of materials

Pramana - Journal of Physics

Volumn 50, Issue 6, 1998, Pages 617-640

  Chakraborty, P ^a  

^a SAHA INSTITUTE OF NUCLEAR PHYSICS   (India)

Author keywords

Compositional profile; Secondary ion emission; Sputtering; Thin films

Indexed keywords

ION BOMBARDMENT; IONIZATION; MASS SPECTROMETERS; SPUTTERING;

IN-DEPTH MATERIALS ANALYSIS; QUANTITATIVE SURFACE ANALYSIS;

SECONDARY ION MASS SPECTROMETRY;

EID: 0032090086     PISSN: 03044289     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02846051     Document Type: Article

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