Electrical measurement of IC device CDs and alignment

Solid State Technology

Volumn 41, Issue 6, 1998, Pages

  Turner, Timothy ^a  

^a Keithley Instruments Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATIC TESTING; ELECTRIC RESISTANCE MEASUREMENT; SEMICONDUCTOR DEVICE TESTING;

AUTOMATED PARAMETRIC TEST (APT) EQUIPMENT;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0032083928     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (0)