A mass spectral investigation of the RF plasmas of small organic compounds: An investigation of the plasma-phase reactions in the plasma deposition from allyl amine

Plasmas and Polymers

Volumn 3, Issue 2, 1998, Pages 97-114

  Beck, Alison J ^a   Candan, Sennur ^a   France, Richard M ^a   Jones, Frank R ^a   Short, Robert D ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

Allyl amine; Mass spectrometry; Plasma deposit; Plasma polymer; XPS

Indexed keywords

AMINES; INFRARED SPECTROSCOPY; MASS SPECTROMETRY; MOLECULAR STRUCTURE; MONOMERS; PLASTIC FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ALLYL AMINE; PLASMA PHASE REACTIONS; PLASMA POLYMERS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0032083722     PISSN: 10840184     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:PAPO.0000005941.22674.75     Document Type: Article

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