Precise modeling of complex SAW structures using a perturbation method hybridized with a finite element analysis

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 45, Issue 3, 1998, Pages 567-573

  Ballandras, Sylvain ^a   Bigler, Emmanuel ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PERTURBATION TECHNIQUES; SUBSTRATES; VARIATIONAL TECHNIQUES;

MONOAXIAL BENDING MOMENTS; SYMMETRICAL RADIAL IN PLANE COMPRESSION; TIERSTEN-SINHA PERTURBATION METHOD;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0032075491     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.677601     Document Type: Article

References (21)

1. M. B. Schultz, B. J. Matzinger, and M. G. Holland, "Temperature dependence of surface acoustic wave velocity on a quartz," J. Appl. Phys., vol. 41, no. 7, pp. 2755-2765, 1970.
2. E. P. EerNisse, "Quartz resonator frequency shifts arising from electrode stress," Proc. 29th Annu. Freq. Cont. Symp., 1975, NTiS AD-A017466, Springfield, VA, pp. 1-4.
3. E. P. EerNisse, "Calculations on the stress-compensated (SCcut) quartz resonator," Proc. 30th Annu. Freq. Cont. Symp., 1976, NTiS AD-A046089, Springfield, VA, pp. 8-11.
4. B. K. Sinha, "A stress and temperature compensated orientation and propagation direction for surface acoustic wave devices," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 34, no. 1, pp. 64-74, 1987.
5. G. Theobald, E. Bigler, and J.-J. Gagnepain, "Stresscompensated cuts for surface acoustic waves," Proc. IEEE Ultrason. Symp., 1986, pp. 209-212.
6. S. Ballandras and E. Bigler, "Doubly rotated SAW quartz cuts with low sensitivity to stress and temperature effects exhibiting a power flow angle close to zero," J. Acoust. Soc. Amer., vol. 95, no. 3, pp. 1390-1395, 1994.
7. S. Ballandras and E. Bigler, "Surface acoustic wave devices with low sensitivity to mechanical and thermoelastic stresses," J. Appl. Phys., vol. 72, no. 8, pp. 3272-3281, 1992.
8. B. K. Sinha and H. F. Tiersten, "On the influence of a flexural biasing state on the velocity of the propagation of surface waves," Wave Motion, vol. 1, pp. 37-51, 1979.
9. H. F. Tiersten and B. K. Sinha, "A perturbation analysis of the attenuation and dispersion of surface waves," J. Appl. Phys., vol. 49, no. 1, pp. 87-95, 1978.
10. P. C. Y. Lee and M. S. H. Tang, "Thickness vibrations of doubly rotated crystal plates under initial deformations," IEEE Thins. Ultrason., Ferroele.ct., Freq. Contr., vol. 34, no. 6, pp. 659-666, 1987.
11. S. Ballandras and E. Bigler, "An analysis of self-supported circular structures for reduced stress sensitivity in SAW devices," Proc. 47th Annu. Freq. Contr. Symp., Salt Lake City, UT, 1993, IEEE 93CH3244-1, pp. 650-655.
12. R. J. Besson, "A new electrodeless resonator design," Proc. 31st Annu. Freq. Contr. Symp., 1977, NTiS AD-A088221, Springfield, VA, pp. 147-152.
13. J. C. Baumhauer and H. F. Tiersten, "Nonlinear electroelastic equations for small fields superposed on a bias," J. Acoust. Soc. Amer., vol. 54, no. 4, pp. 1017-1074, 1973.
14. R. N. Thurston, Physical Acoustics, Principle and Methods, Part A: Wave Propagation in Fluids and Solids, vol. I. W. P. Mason, Ed. New York: Academic Press, 1965.
15. K. A. Ingebrigtsen, "Surface waves in piezoelectrics," J. Appl. Phys., vol. 40, no. 7, pp. 2681-2687, 1969.
16. S. P. Timoshenko and J. W. Goodier, Eds. Theory of Elasticity, 3rd ed. (International Student Edition). New York: McGrawHill, 1970.
17. MODULEE, une bibliothèque modulaire d'éléments finis., I.N.R.I.A., Technical Reports, 1988 (available from INRIA, Domaine de Voluceau, Rocquencourt, 78153 Le Chesnay Cedex, Erance).
18. A. J. Slobodnik, E. D. Conway, and R. T. Delmonico, Microwave Acoustics Handbook: Surface Wave Velocities, vol. 1A. Air Force Cambridge Research Labs, AF CRL-TR-730597/NTiS, Springfield, VA, 1973.
19. R. N. Thurston, H. J. McSkimin, and P. Andreacht, "Third order elastic coefficients of quartz," J. Appl. Phys., vol. 37, pp. 267275, 1966.
20. "IEEE Standard on Piezoelectricity 176-1949," Proc. IRE, vol. 37, pp. 1378-1395, 1949.
21. S. Ballandras, "Sensibilité des oscillateurs àquartz àondes de surface aux contraintes et gradients thermiques," Thèse de doctorat, Université de Franche-Comté, Besançon, France, 1991.