Fabrication of ultrafast Si based MSM photodetector

Electronics Letters

Volumn 34, Issue 10, 1998, Pages 1027-1028

  Loken M ^a   Kappius, L ^a   Manti, S ^a   Buchal, Ch ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT COMPOUNDS; PHOTODIODES; QUANTUM EFFICIENCY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SINGLE CRYSTALS;

ULTRAFAST METAL SEMICONDUCTOR METAL (MSM) PHOTODETECTORS;

PHOTODETECTORS;

EID: 0032075238     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19980661     Document Type: Article

References (5)

1. CHIA-CHI WANG, ALEXANDROU, S., JACOBS-PERKINS, D., and HSIANG, T.Y.: 'Comparison of the picosecond characteristics of silicon and silicon-on-sapphire metal- semiconductor-metal photodiodes', Appl. Phys. Lett., 1994, 64, (26), pp. 3578-3580
2. LIU, M.Y., CHEN, E., and CHOU, S.Y.: '140-GHz metal-semiconductor-metal-photodetectors on silicon-on-insulator substrate with scaled active layer', Appl. Phys. Lett., 1994, 65, (7), pp. 887-888
3. MANTL, S.: 'Ion beam synthesis of epitaxial silicides: Fabrication, characterisation and applications', Mater. Sci. Rep., 1992, 8, (1)
4. BURN, J., LITVIN, K.L., SCHAFF, W.J., and EASTMANN, L.F.: 'Optimisation of high speed MSM photodetectors', IEEE Photonics Technol. Lett., 1994, 6, pp. 722-724
5. SIEGERT, M., LÖKEN, M., and BUCHAL, CH.: to be published