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Volumn 127-129, Issue , 1998, Pages 457-461
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In situ growth of ferroelectric lead zirconate-titanate thin films on Si substrates by pulsed Nd:YAG laser deposition
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Author keywords
Ferroelectric thin films; Pulsed laser deposition; PZT
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Indexed keywords
CRYSTAL ORIENTATION;
DEPOSITION;
FERROELECTRIC MATERIALS;
FILM GROWTH;
LEAD COMPOUNDS;
NEODYMIUM LASERS;
PIEZOELECTRICITY;
PULSED LASER APPLICATIONS;
SECONDARY ION MASS SPECTROMETRY;
SILICON;
THIN FILMS;
X RAY ANALYSIS;
LEAD ZIRCONATE TITANATE;
PULSED LASER DEPOSITION (PLD);
DIELECTRIC FILMS;
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EID: 0032073288
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(97)00672-7 Document Type: Article |
Times cited : (13)
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References (14)
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