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Volumn 46, Issue 5, 1998, Pages 740-741
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A rigorous coupled-wave analysis and crossed-diffraction grating analysis of radiation and scattering from three-dimensional inhomogeneous objects
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
DIFFRACTION GRATINGS;
ELECTROMAGNETIC WAVE SCATTERING;
MAXWELL EQUATIONS;
CROSSED DIFFRACTION GRATING ANALYSIS;
RIGOROUS COUPLED WAVE ANALYSIS (RCWA);
ELECTROMAGNETIC FIELD THEORY;
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EID: 0032073246
PISSN: 0018926X
EISSN: None
Source Type: Journal
DOI: 10.1109/8.668922 Document Type: Article |
Times cited : (7)
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References (4)
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