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Volumn 145, Issue 5, 1998, Pages 1692-1695

Segregation of oxygen at a solid/liquid interface in silicon

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN LIQUIDS; PHASE INTERFACES; SILICON; SINGLE CRYSTALS; SOLIDIFICATION;

EID: 0032072931     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838541     Document Type: Article
Times cited : (10)

References (13)
  • 5
    • 11744298532 scopus 로고
    • W. M. Bullis, Editor, PV 95-X, The Electrochemical Society Proceedings Series, Pennington, NJ
    • H. Harada, T. Itoh, N. Ozawa, and T. Abe, in VLSI Science and Technology, W. M. Bullis, Editor, PV 95-X, p. 526, The Electrochemical Society Proceedings Series, Pennington, NJ (1995).
    • (1995) VLSI Science and Technology , pp. 526
    • Harada, H.1    Itoh, T.2    Ozawa, N.3    Abe, T.4
  • 6
    • 3843079847 scopus 로고
    • H. R. Huff, W. Bergholz, and K. Sumino, Editors, PV 94-10, The Electrochemical Society Proceedings Series, Penington, NJ
    • E. Iino, K. Tanaka, I. Fusegawa, and H. Yamagishi, in Semiconductor Silicon 1994, H. R. Huff, W. Bergholz, and K. Sumino, Editors, PV 94-10, p. 148, The Electrochemical Society Proceedings Series, Penington, NJ (1994).
    • (1994) Semiconductor Silicon 1994 , pp. 148
    • Iino, E.1    Tanaka, K.2    Fusegawa, I.3    Yamagishi, H.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.