Application of non-normal process capability indices to semiconductor quality control

IEEE Transactions on Semiconductor Manufacturing

Volumn 11, Issue 2, 1998, Pages 296-303

  Bittanti, Sergio ^a,b   Lovera, Marco ^a,b   Moiraghi, Luca ^a,c  

^a IEEE   (Italy)

^b POLITECNICO DI MILANO   (Italy)

^c MEMC Electronic Materials   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CURVE FITTING; QUALITY CONTROL; SEMICONDUCTOR DEVICE MODELS; STATISTICAL PROCESS CONTROL;

PROCESS CAPABILITY INDICES (PCI);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032072638     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.670179     Document Type: Article

References (16)

1. P. Ciarlini, A. Gigli, G. Regogliosi, L. Moiraghi, and A. Montefusco, "Monitoring an industrial process: Bootstrap estimation of the accuracy of quality parameters," presented at Advanced Tools in Metrology, Oxford, U.K., 1995.
2. J. A. Clements, "Process capability calculations for nonnormal distributions," Qual. Progr., vol. 22, no. 2, pp. 95-100, 1989.
3. B. Efron and R. J. Tibshirani, An Introduction to the Bootstrap. London, U.K.: Chapman & Hall, 1993.
4. pk using real-time feedback control," IEEE Trans. Semiconduct. Manufact., vol. 9, pp. 87-94, Feb. 1996.
5. W. P. Elderton and N. L. Johnson, Systems of Frequency Curves. Cambridge, U.K.: Cambridge Univ. Press, 1969.
6. N. Farnum, "Using Johnson curves to describe nonnormal process data," Qual. Eng., vol. 9, no. 2, pp. 329-336, 1996-1997.
7. L. A. Franklin and G. S. Wesserman, "Bootstrap lower confidence limits for capability indices," J. Qual. Technol., vol. 24, no. 4, pp. 196-210, 1992.
8. J. D. Hamilton, Time Series Analysis. Princeton, NJ: Princeton Univ. Press, 1994.
9. 2, expressed in standard measure," Biometrika, vol. 50, no. 3-4, pp. 459-498, 1963.
10. M. Kendall and A. Stuart, The Advanced Theory of Statistics. London, U.K.: Charles Griffin, 1969.
11. S. Kotz and N. L. Johnson, Process Capability Indices. London, U.K.: Chapman & Hall, 1993.
12. M. Lovera, L. Moiraghi, A. Montefusco, and D. Valentini, "Estimation of industrial process capabilities: Some proposals and studies to overcome the obstacle of nonnormal distributions," in Proc. 3rd SIMAI Nat. Conf., Pavia, Italy, 1996, pp. 627-631.
13. D. C. Montgomery, Introduction to Statistical Quality Control. New York: Wiley, 1996.
14. R. N. Rodriguez, "Recent developments in process capability analysis," J. Qual. Technol., vol. 24, no. 4, pp. 176-186, 1992.
15. SEMI Doc. 2629, Guide to Statistical Specifications.
16. S. E. Somerville and D. C. Montgomery, "Process capability indices and nonnormal distributions," Qual. Eng., vol. 9, no. 2, pp. 305-316, 1996-1997.