SCOPUS 정보 검색 플랫폼

Volumn 127-129, Issue , 1998, Pages 668-673

Nitride-molecule synthesis in plasma produced by reactive laser ablation assisted by RF discharge for thin-film deposition

(5) Vivien, C a Dinescu, M b Meheust, P a Caricato, A P c Perriere J d

a UNIVERSITÉ D'ORLÉANS (France)

b NATIONAL INSTITUTE FOR LASER (Romania)

c UNIVERSITY OF SALENTO (Italy)

d SORBONNE UNIVERSITÉ (France)

Author keywords

Carbonitride; Laser ablation; film deposition; Laser produced plasma; Spectroscopy

Indexed keywords

AMMONIA; DEPOSITION; EXCIMER LASERS; GRAPHITE; LASER ABLATION; LASER PRODUCED PLASMAS; MOLECULAR PHYSICS; MOLECULAR SPECTROSCOPY; NITROGEN; STOICHIOMETRY; SYNTHESIS (CHEMICAL); THIN FILMS;

CARBONITRIDE; NUCLEAR ANALYSIS; PLASMA EMISSION SPECTROSCOPY;

NITRIDES;

EID: 0032072356 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(97)00723-X Document Type: Article

Times cited : (13)

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