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Volumn 187, Issue 2, 1998, Pages 185-193
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Lateral overgrowth and epitaxial lift-off of InP by halide vapor-phase epitaxy
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Author keywords
CLEFT; Epitaxial lift off; Halide VPE; Lateral overgrowth
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Indexed keywords
CRYSTAL ORIENTATION;
MORPHOLOGY;
SEMICONDUCTING INDIUM PHOSPHIDE;
SEMICONDUCTOR GROWTH;
SUBSTRATES;
VAPOR PHASE EPITAXY;
CLEAVAGE OF LATERAL EPITAXIAL FILMS FOR TRANSFER (CLEFT) PROCESS;
EPITAXIAL LIFT OFF TECHNIQUES;
GALLIUM INDIUM NITRIDE;
LATERAL OVERGROWTH;
SEMICONDUCTING FILMS;
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EID: 0032071566
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(97)00870-1 Document Type: Article |
Times cited : (9)
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References (15)
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