Source of a dense metal plasma

Plasma Sources Science and Technology

Volumn 7, Issue 2, 1998, Pages 141-148

  Anpilov, A M ^a   Barkhudarov, E M ^a   Berezhetskaya, N K ^a   Kop'ev, V A ^a   Kossyi, I A ^a   Malykh, N I ^a   Matossian, J ^a,b   Taktakishvili, M I ^a   Terekhin, V E ^a  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^b Hughes Aircraft Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY MEASUREMENT (SPECIFIC GRAVITY); DEPOSITION; INTERFEROMETERS; PLASMA DENSITY; PLASMA PROBES; SURFACE DISCHARGES; THIN FILMS; TITANIUM NITRIDE;

LANGMUIR PROBES; MICROWAVE INTERFEROMETERS;

PLASMA SOURCES;

EID: 0032071538     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/2/008     Document Type: Article

References (20)

1. 2 laser of large volume Kvant. Electron. 2 2086
2. 2 laser using preionization by ultraviolet radiation Appl. Phys. Lett. 22 95
3. 1994 Physics and chemistry of gas discharges in microwave beams Tr. Inst. Obshchei Fiz., Ross. Akad. Nauk. vol 47 (Moscow: Nauka) p 139
4. Barkhudarov E M, Berezhetskaya N K, Bol'shakov E F et al 1984 Ring source of a dense collisionless plasma and ionizing radiation Zh. Tekh. Fiz. 54 1219 (in Russian)
5. Karfidov D M, Kupriyanova E B and Sergeichev K F 1989 Study of the nonlinear penetration of a microwave field in a sheath of a dense plasma, abstract Proc. 19th Int. Conf. on Phenomena in Ionized Gases (Belgrade, 1989) vol 1, pp 42-3
6. Karfidov D M, Kupriyanova E B and Sergeichev KF 1989 Fast bleaching of subcritical plasma due to nonlinear effects of an electromagnetic wave Fiz. Plazmy 15 797-804 (Engl. Transi. Sov. J. Plasma Phys. 15 460)
7. Karfidov D M, Kupriyanova E B and Sergeichev KF 1989 Fast bleaching of subcritical plasma due to nonlinear effects of an electromagnetic wave Fiz. Plazmy 15 797-804 (Engl. Transi. Sov. J. Plasma Phys. 15 460)
8. Berezhetskaya N K, Bol'shakov E F, Golubev S K, Kossyi I A, Semyenov V E and Terekhin VE 1984 Gas-dynamic phenomena accompanying ring surface discharges Zh. Eksp. Teor. Fiz. 87 1927 (in Russian)
9. Barkhudarov E M, Mdivnishvili M O, Sokolov I V, Taktakishvili M I and Terekhin V E 1991 Mach reflection of a ring shock wave from the axis of symmetry J. Fluid Mech. 226 497
10. Brown I G 1987 IEEE Trans. Plasma Sci. PS-15 346 Brown I G 1992 Rev. Sci. Instrum. 63 2341
11. Brown I G 1987 IEEE Trans. Plasma Sci. PS-15 346 Brown I G 1992 Rev. Sci. Instrum. 63 2341
12. Schuegraf K K (ed) 1995 Handbook of Thin Film Deposition Processes and Techniques (Park Ridge, NJ: Noyes)
13. Matossian J N, Vajo J J, Wysocki J A and Bellon M E 1993 Plasma ion implantation (PII) to improve the wear life of tungsten carbide drill bits used in printed wiring board (PWB) fabrication Surface and Coating Technology 62 595
14. Aldokhin V N, Batanov G M, Berezhetskaya N K, Vorontsova S I, Gritsinin S I, Ivanov V A, Kossyi I A, Lazareva I Yu and Sergeichev K F 1982 Unipolar arc in a microwave discharge plasma Fiz. Plazmy 8 189 (in Russian) (Engl. Transi. Sov. J. Plasma Phys. 8)
15. Aldokhin V N, Batanov G M, Berezhetskaya N K, Vorontsova S I, Gritsinin S I, Ivanov V A, Kossyi I A, Lazareva I Yu and Sergeichev K F 1982 Unipolar arc in a microwave discharge plasma Fiz. Plazmy 8 189 (in Russian) (Engl. Transi. Sov. J. Plasma Phys. 8)
16. Anpilov A M, Berezhetskaya N K, Kop'ev, V A and Kossyi I A 1997 Explosive-emissive source of a carbon plasma Fiz. Plazmy 23 454 (in Russian) (Engl. Transl. Plasma Phys. Rep. 15 460)
17. Anpilov A M, Berezhetskaya N K, Kop'ev, V A and Kossyi I A 1997 Explosive-emissive source of a carbon plasma Fiz. Plazmy 23 454 (in Russian) (Engl. Transl. Plasma Phys. Rep. 15 460)
18. Berezhetskaya N K, Bol'shakov E F and Dorofeyuk A A 1983 Electrooptical transducer in the system of a double probe Prib. Tekh. Eksp. 127 (in Russian)
19. Huddlestone R and Leonard S L (ed) 1965 Plasma Diagnostic Techniques (New York: Academic)
20. Mesyats G A and Proskurovskii D I 1984 Pulsed Electric Discharges in Vacuum (Novosibirsk: Nauka) p 256 (in Russian)