Neutral silicon clusters produced by laser ablation in vacuum

Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 362-367

  Okano, Akiko ^a   Takayanagi, Kunio ^a,b  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Laser ablation; Neutral silicon clusters; Vacuum

Indexed keywords

EXCIMER LASERS; PARTICLE SIZE ANALYSIS; PHOTOIONIZATION; PULSED LASER APPLICATIONS; SEMICONDUCTING SILICON; VACUUM APPLICATIONS;

NEUTRAL SILICON CLUSTERS;

LASER ABLATION;

EID: 0032070402     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00656-9     Document Type: Article

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