Analysis of constituents generated with laser machining of Si3N4 and SiC

Journal of Materials Science Letters

Volumn 17, Issue 9, 1998, Pages 737-739

  Shigematsu, Ichinori ^a   Kanayama, Kouzou ^a   Tsuge, Akira ^a   Nakamura, Mamoru ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE LASERS; CHEMICAL REACTIONS; INFRARED SPECTROSCOPY; LASER APPLICATIONS; MACHINING; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS;

LASER BEAM SCANNING; LASER MACHINING;

SILICON NITRIDE;

EID: 0032070328     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1006606810476     Document Type: Article

References (5)

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2. J. YAMAMOTO and Y. YAMAMOTO, in Proceedings of LAMP'87 OSAKA, (1987) 297.
3. I. SHIGEMATSU, M. NAKAMURA, K. KANAYAMA and Y. HIRAI, J. High Temp. Soc. Jpn. 18 (1992) 36.
4. I. SHIGEMATSU, M. NAKAMURA, K. KANAYAMA and Y. HIRAI, J. Ceram. Soc. Jpn. International edition, 101 (1993) 591.
5. I. SHIGEMATSU, M. NAKAMURA, K. KANAYAMA and K. SAITO, Rev. Laser Eng. 22 (1994) 899.