Low temperature electrical surface passivation of MBE-grown pin diodes by hydrogen and oxygen plasma processes

Thin Solid Films

Volumn 321, Issue 1-2, 1998, Pages 261-264

  Strass, A ^a   Hansch, W ^a   Kaesen, F ^a   Fehlauer, G ^a   Bieringer, P ^a   Fischer, A ^a   Eisele, I ^a  

^a BUNDESWEHR UNIVERSITY MUNICH   (Germany)

Author keywords

MBE grown pin diodes; Plasma processes; Surface passivation

Indexed keywords

CHARGE CARRIERS; DESORPTION; HYDROFLUORIC ACID; HYDROGENATION; LEAKAGE CURRENTS; MOLECULAR BEAM EPITAXY; PASSIVATION; PLASMA APPLICATIONS; SEMICONDUCTOR GROWTH; THERMOOXIDATION; TRANSPORT PROPERTIES;

PIN DIODES; PLASMA ASSISTED LOW TEMPERATURE PROCESSES;

SEMICONDUCTOR DIODES;

EID: 0032068826     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00484-2     Document Type: Article

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