Multi-beam mixing implantation system and its applications

Surface and Coatings Technology

Volumn 103-104, Issue , 1998, Pages 195-199

  Zhang, Q Y ^a   Long, Z H ^a   Ren, C S ^a   Guo, B H ^a   Xu, D Q ^a   Ma, T C ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Apparatus; Dropwise condensation; Ion implantation; Polymer film; TiN coatings

Indexed keywords

COATINGS; COMPOSITION; CORROSION RESISTANCE; ELECTRON BEAMS; HARDNESS; HEAT TRANSFER; INSTRUMENTS; ION BEAMS; PLASTIC FILMS; SURFACE TREATMENT; TECHNOLOGY; TITANIUM NITRIDE;

DROPWISE CONDENSATION; ION BEAM ASSISTED DEPOSITION; ION BEAM DYNAMIC MIXING; MULTI BEAM MIXING IMPLANTATION SYSTEM; SPUTTERED ATOM BEAM; VACUUM ARC PLASMA DEPOSITION BEAM;

ION IMPLANTATION;

EID: 0032068576     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00393-4     Document Type: Article

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