Ion-beam-induced stress reduction in refractory metal films

Surface and Coatings Technology

Volumn 103-104, Issue , 1998, Pages 20-24

  Jain, Amitabh ^a,b  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

Ion beam irradiation; Refactory metal films; Stress reduction

Indexed keywords

CHROMIUM; CRYSTAL LATTICES; DEPOSITION; FILM GROWTH; METALLIC FILMS; NUCLEATION; REFRACTORY METALS; STRAIN; STRESSES; SUBSTRATES; TENSILE PROPERTIES; X RAY DIFFRACTION;

CHROMIUM FILM; FILM THICKNESS; LATTICE STRAIN; REFRACTORY METAL FILM; STRESS REDUCTION; TENSILE STRESS;

ION BOMBARDMENT;

EID: 0032068527     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00441-1     Document Type: Article

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