A sensor for thin film thickness monitor using torsional quartz crystal resonators of stepped, free-free bar-type

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 5 SUPPL. B, 1998, Pages 2856-2858

  Kawashima, Hirofumi ^a   Sunaga, Kenji ^a  

^a SEIKO INSTRUMENTS INC   (Japan)

Author keywords

Free free bar; Microsensor; Quartz crystal; Stepped vibration bar; Thin film thickness; Torsional mode

Indexed keywords

ALUMINUM; BARS (METAL); BOUNDARY CONDITIONS; CALCULATIONS; CRYSTAL RESONATORS; EQUATIONS OF MOTION; ETCHING; GOLD; NATURAL FREQUENCIES; THICKNESS MEASUREMENT; THIN FILMS; VIBRATIONS (MECHANICAL);

CONTINUATION CONDITION; MICROSENSOR; QUARTZ CRYSTAL RESONATOR; STEPPED VIBRATION BAR; THICKNESS MONITORING; TORSIONAL MODE;

SENSORS;

EID: 0032068506     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2856     Document Type: Article

References (5)

1. H. Kawashima and M. Nakazato: Trans. IEICE (A) J76-A (1993) 1 [in Japanese].
2. H. Kawashima and M. Nakazato: Proc. 45th Annual Symp. Frequency Control, U.S.A. (1991) p. 130.
3. H. Kawashima and K. Sunaga: Jpn. J. Appl. Phys. 35 (1996) 3050.
4. M. Aruga: Bull. Tokyo Inst. Tech. A-2 (1956) p. 88 [in Japanese).
5. Rika-nenpyo (Chronological Scientific Tables), National Astronomical Observatory (Maruzen Co., Ltd., Tokyo, 1994).