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Volumn 141, Issue 1-4, 1998, Pages 675-678

VUV-light-induced deposited silica films

Author keywords

Excimer; Silica; Thin films; UV light

Indexed keywords

ABLATION; BOND STRENGTH (CHEMICAL); DEPOSITION; ELECTRODES; ELLIPSOMETRY; MORPHOLOGY; POLYIMIDES; POLYPROPYLENES; SILICA; SILICON WAFERS; ULTRAVIOLET RADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0032068194     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00063-9     Document Type: Article
Times cited : (5)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.