메뉴 건너뛰기




Volumn 141, Issue 1-4, 1998, Pages 169-173

Ion beam assisted unzipping of PMMA

Author keywords

Ion beam; PMMA; Unzipping

Indexed keywords

ION BOMBARDMENT; MASS SPECTROMETERS; MONOMERS; POLYMERIZATION; THERMAL EFFECTS; THIN FILMS;

EID: 0032068097     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00087-1     Document Type: Article
Times cited : (40)

References (13)
  • 1
    • 0002753621 scopus 로고
    • Introduction to Microlithography
    • L.F. Thompson, G.C. Willson, M.J. Bowden (Eds.)
    • G.C. Willson, in: L.F. Thompson, G.C. Willson, M.J. Bowden (Eds.), Introduction to Microlithography, ACS Symposium Series, vol. 219, 1983, p. 87.
    • (1983) ACS Symposium Series , vol.219 , pp. 87
    • Willson, G.C.1
  • 2
    • 0001851296 scopus 로고
    • Radiation Effects on Polymeric Materials
    • S.W. Shalaby, R.R. Clough (Eds.)
    • J.A. Moore, J.O. Choi, in: S.W. Shalaby, R.R. Clough (Eds.), Radiation Effects on Polymeric Materials, ACS Symposium Series, vol. 475, 1991, p. 156.
    • (1991) ACS Symposium Series , vol.475 , pp. 156
    • Moore, J.A.1    Choi, J.O.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.