Characteristics of the species ablated from silicon surface by pulsed CO2 laser irradiation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 5 A, 1998, Pages 2666-2669

  Sakka, Tetsuo ^a   Hotta, Kokichi ^a   Kuroyanagi, Akira ^a   Akiba, Satoshi ^a   Mabuchi, Mahito ^b   Ogata, Yukio H ^a  

^a KYOTO UNIVERSITY   (Japan)

^b NIIHAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

CO2 laser; Laser ablation; Mass spectroscopy; Silicon ion; Time of flight

Indexed keywords

CARBON DIOXIDE LASERS; IONS; MASS SPECTROMETRY; SILICON;

TIME OF FLIGHT;

LASER ABLATION;

EID: 0032067980     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2666     Document Type: Article

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