Roughness measurements in the picometric range using a polarization interferometer and a multichannel lockin detection technique

International Journal of Machine Tools and Manufacture

Volumn 38, Issue 5-6, 1998, Pages 715-717

  Gleyzes, P ^a   Loriette, V ^a   Saint Jalmes, H ^b   Boccara, A C ^a  

^a CNRS   (France)

^b UNIVERSITÉ PARIS EST CRÉTEIL   (France)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; LIGHT MODULATORS; LIGHT POLARIZATION; OPTICAL MICROSCOPY; PHOTOELASTICITY; SURFACE ROUGHNESS;

INTERFEROMETRIC POLARIZATION MICROSCOPES;

ROUGHNESS MEASUREMENT;

EID: 0032067703     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(97)00122-3     Document Type: Article

References (8)

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