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Volumn 227-230, Issue PART 2, 1998, Pages 896-900

Morphological and crystallographic defect properties of microcrystalline silicon: A comparison between different growth modes

(7) Houben, L a Luysberg, M a Hapke, P a Vetterl, O a Finger, F a Carius, R a Wagner, H a

a FORSCHUNGSZENTRUM JÜLICH (Germany)

Author keywords

Layer by layer growth; Microcrystalline silicon; Plasma enhanced chemical vapour deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; CRYSTAL ORIENTATION; CRYSTALLINE MATERIALS; EPITAXIAL GROWTH; GRAIN SIZE AND SHAPE; MORPHOLOGY; NUCLEATION; SEMICONDUCTING FILMS; SEMICONDUCTOR GROWTH; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

MICROCRYSTALLINE SILICON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD);

SEMICONDUCTING SILICON;

EID: 0032067244 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(98)00239-7 Document Type: Article

Times cited : (9)

References (15)

1
- 0013515556
- Mater. Res. Soc., Pittsburgh, 1988
- S. Oda, J. Noda, M. Matsumura, Mater. Res. Soc. Symp. Proc. 118 (1988) 117, (Mater. Res. Soc., Pittsburgh, 1988).
- (1988) Mater. Res. Soc. Symp. Proc. , vol.118 , pp. 117
- Oda, S.¹ Noda, J.² Matsumura, M.³

2
- 0038969740
- M. Luysberg, P. Hapke, R. Carius, F. Finger, Philos. Mag. A 75 (1997) 31.
- (1997) Philos. Mag. A , vol.75 , pp. 31
- Luysberg, M.¹ Hapke, P.² Carius, R.³ Finger, F.⁴

3
- 0000082886
- A. Asano, Appl. Phys. Lett. 56 (1990) 533.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 533
- Asano, A.¹

4
- 0026882660
- G.N. Parsons, J.J. Boland, C. Tsang, Jpn. J. Appl. Phys. 31 (1992) 1943.
- (1992) Jpn. J. Appl. Phys. , vol.31 , pp. 1943
- Parsons, G.N.¹ Boland, J.J.² Tsang, C.³

5
- 0029256037
- H. Shirai, Jpn. J. Appl. Phys. 34 (1995) 450.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 450
- Shirai, H.¹

6
- 0030674881
- Mater. Res. Soc., Pittsburgh, 1997
- F. Finger, R. Carius, P. Hapke, L. Houben, M. Luysberg, M. Tzolov, Mater. Res. Soc. Symp. Proc. 452 (1997) 725, (Mater. Res. Soc., Pittsburgh, 1997).
- (1997) Mater. Res. Soc. Symp. Proc. , vol.452 , pp. 725
- Finger, F.¹ Carius, R.² Hapke, P.³ Houben, L.⁴ Luysberg, M.⁵ Tzolov, M.⁶

7
- 0030704166
- Mater. Res. Soc., Pittsburgh, 1997
- P. Hapke, R. Carius, F. Finger, A. Lambertz, O. Vetterl, H. Wagner, Mater. Res. Soc. Symp. Proc. 452 (1997) 737, (Mater. Res. Soc., Pittsburgh, 1997).
- (1997) Mater. Res. Soc. Symp. Proc. , vol.452 , pp. 737
- Hapke, P.¹ Carius, R.² Finger, F.³ Lambertz, A.⁴ Vetterl, O.⁵ Wagner, H.⁶

8
- 0000493249
- P. Roca i Cabarrocas, N. Layadi, T. Heitz, B. Drévillon, Appl. Phys. Lett. 66 (1995) 3609.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3609
- Roca I Cabarrocas, P.¹ Layadi, N.² Heitz, T.³ Drévillon, B.⁴

9
- 84974844165
- P. Roca i Cabarrocas, S. Hamma, A. Hadjadj, J. Bertomeu, J. Andreu, Appl. Phys. Lett. 69 (1996) 529.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 529
- Roca I Cabarrocas, P.¹ Hamma, S.² Hadjadj, A.³ Bertomeu, J.⁴ Andreu, J.⁵

10
- 0001663432
- R.W. Collins, Y. Yang, J. Vac. Sci. Technol. B 7 (1989) 1155.
- (1989) J. Vac. Sci. Technol. B , vol.7 , pp. 1155
- Collins, R.W.¹ Yang, Y.²

11
- 0003038256
- H. Fritzsche (Ed.), World Scientific Publishing, Singapore
- C.C. Tsai, in: H. Fritzsche (Ed.), Amorphous Silicon and Related Materials. World Scientific Publishing, Singapore, 1988, 123.
- (1988) Amorphous Silicon and Related Materials , pp. 123
- Tsai, C.C.¹

12
- 0028529704
- H. Shirai, B. Drévillon, I. Shimizu, Jpn. J. Appl. Phys. 33 (1994) 5590.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 5590
- Shirai, H.¹ Drévillon, B.² Shimizu, I.³

13
- 36449000019
- T. Akasaka, I. Shimizu, Appl. Phys. Lett. 66 (1995) 3441.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3441
- Akasaka, T.¹ Shimizu, I.²

14
- 0024781441
- C.C. Tsai, G.B. Anderson, R. Thompson, B. Wacker, J. Non-Cryst. Solids 114 (1989) 151.
- (1989) J. Non-Cryst. Solids , vol.114 , pp. 151
- Tsai, C.C.¹ Anderson, G.B.² Thompson, R.³ Wacker, B.⁴

15
- 6244251920
- D.J. Eaglesham, J. Appl. Phys. 77 (1995) 3597.
- (1995) J. Appl. Phys. , vol.77 , pp. 3597
- Eaglesham, D.J.¹

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