Research in and industrial application of metal source ion implantation at Beijing normal university

Surface and Coatings Technology

Volumn 103-104, Issue , 1998, Pages 200-204

  Zhang, Huixing ^a   Zhang, Xiaoji ^a   Zhou, Fengsheng ^a   Li, Qiang ^a   Wu, Xanying ^a   Lin, Wenlian ^a   Zhang, Tonghe ^a  

^a BEIJING NORMAL UNIVERSITY   (China)

Author keywords

Ion implantation; Metal ion source; Plasma deposition; Surface modification

Indexed keywords

ADHESION; CORROSION RESISTANCE; DEPOSITION; FRICTION; HARDNESS; INDUSTRIAL APPLICATIONS; ION BEAMS; ION SOURCES; PLASMA APPLICATIONS; STRENGTH OF MATERIALS; SURFACE TREATMENT; WEAR RESISTANCE;

FILTERED VACUUM ARC PLASMA SOURCES; FRICTION COEFFICIENT; LARGE SCALE METAL SOURCE ION IMPLANTER; METAL ION SOURCE; METAL PLASMA DEPOSITION IMPLANTATION SYSTEM; PLASMA DEPOSITION;

ION IMPLANTATION;

EID: 0032066748     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00398-3     Document Type: Article

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