10 GHz range low-loss ladder type surface acoustic wave filter

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 5 B, 1998, Pages 2927-2928

  Odagawa, Hiroyuki ^a   Qureshi, Jamil A ^a   Meguro, Toshiyasu ^a   Yamanouchi, Kazuhiko ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

10 GHz range filter; Ladder type filter; Low loss filter; Submicron fabrication; Surface acoustic wave

Indexed keywords

ELECTRODES; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; EQUIVALENT CIRCUITS; FABRICATION; THICK FILMS; THICKNESS MEASUREMENT;

LADDER TYPE FILTER; LOW LOSS FILTER; SUBMICRON FABRICATION;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0032066657     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2927     Document Type: Article

References (4)

1. K. Yamanouchi: Proc. 1994 IEEE Ultrason. Symp. (IEEE, New York, 1994) p. 421.
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3. T. Nishihara, H. Uchishiba, O. Ikata and Y. Satoh: Jpn. J. Appl. Phys. 34 (1995) 2688.
4. K. Kojima and K. Shibayama: Proc. 7th Symp. Ultrasonic Electronics, Kyoto 1986, Jpn. J. Appl. Phys. 26 (1987) Suppl. 26-1, p. 117.