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Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 2, 1998, Pages 1213-1216

Enlargement of on/off current ratio in poly-silicon TFT by selective crystallization method

(5) Jeon, Jae Hong a Park, Cheol Min a Choi, Kwon Young a Kim, Cheon Hong a Han, Min Koo a

a Seoul National University (South Korea)

Author keywords

Excimer laser; On current; Poly silicon TFT

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; ELECTRIC CURRENT CONTROL; EXCIMER LASERS; LASER BEAM EFFECTS; LEAKAGE CURRENTS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

ON/OFF CURRENT RATIO;

THIN FILM TRANSISTORS;

EID: 0032066063 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(98)00309-3 Document Type: Article

Times cited : (2)

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