Optical study of low energy ion-beam-assisted deposited diamond-like carbon films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 141, Issue 1-4, 1998, Pages 144-147

  Chen, Z Y ^a   Yu, Y H ^a   Zhao, J P ^a   Ren, C X ^a   Ding, X Z ^a   Shi, T S ^a   Liu, X H ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Diamond like carbon; Ion beam assisted deposition; Optical characterization

Indexed keywords

APPROXIMATION THEORY; DIAMOND FILMS; ENERGY GAP; FILM PREPARATION; INFRARED RADIATION; RAMAN SPECTROSCOPY; SILICON WAFERS; SINGLE CRYSTALS;

ION BEAM ASSISTED DEPOSITION (IBAD);

ION BOMBARDMENT;

EID: 0032065940     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00155-4     Document Type: Article

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