SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 1, 1998, Pages 29-33

a-Si:H deposited at high rate on the cathode of a rf-PECVD reactor

(4) Will, Stephan a Mell, Helmut a Poschenrieder, Margarethe b Fuhs, Walther b

a PHILIPPS UNIVERSITY MARBURG (Germany)

b HAHN MEITNER INSTITUT (Germany)

Author keywords

Cathode film; Hydrogenated amorphous silicon; Plasma enhanced chemical vapor deposition reactor

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CATHODES; CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; HYDROGENATION; ION BOMBARDMENT;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD);

SEMICONDUCTING SILICON;

EID: 0032065080 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(98)00328-7 Document Type: Article

Times cited : (9)

References (18)

1
- 0003922542
- Marcel Dekker, New York
- W. Luft, Y.S. Tsuo, Hydrogenated Amorphous Silicon Alloy Deposition Processes, Marcel Dekker, New York, 1993.
- (1993) Hydrogenated Amorphous Silicon Alloy Deposition Processes
- Luft, W.¹ Tsuo, Y.S.²

2
- 0027907069
- P. Roca i Cabarrocas, J. Non-Cryst. Solids 164-166 (1993) 37.
- (1993) J. Non-Cryst. Solids , vol.164-166 , pp. 37
- Roca I Cabarrocas, P.¹

3
- 0001109962
- S. Guha, J. Yang, S. Jones, Y. Chen, D. Williamson, Appl. Phys. Lett. 61 (1992) 1444.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1444
- Guha, S.¹ Yang, J.² Jones, S.³ Chen, Y.⁴ Williamson, D.⁵

4
- 0026188441
- F.H. Karg, B. Hirschauer, W. Kasper, K. Pierz, Solar Energy Mater. 22 (1991) 169.
- (1991) Solar Energy Mater. , vol.22 , pp. 169
- Karg, F.H.¹ Hirschauer, B.² Kasper, W.³ Pierz, K.⁴

5
- 0026389756
- P. Wickboldt, S.J. Jones, F.C. Marques, D. Pang, W.A. Turner, A.E. Wetsel, W. Paul, J.H. Chen, Philos. Mag. B 64 (1991) 655.
- (1991) Philos. Mag. B , vol.64 , pp. 655
- Wickboldt, P.¹ Jones, S.J.² Marques, F.C.³ Pang, D.⁴ Turner, W.A.⁵ Wetsel, A.E.⁶ Paul, W.⁷ Chen, J.H.⁸

6
- 0012954913
- W. Kasper, H. Böhm, B. Hirschauer, J. Appl. Phys. 71 (1992) 4168.
- (1992) J. Appl. Phys. , vol.71 , pp. 4168
- Kasper, W.¹ Böhm, H.² Hirschauer, B.³

7
- 0000393088
- C. Wild, P. Koidl, Appl. Phys. Lett. 54 (1989) 505.
- (1989) Appl. Phys. Lett. , vol.54 , pp. 505
- Wild, C.¹ Koidl, P.²

8
- 0000473771
- D. Ritter, K. Weiser, E. Zeldov, J. Appl. Phys. 62 (1987) 4563.
- (1987) J. Appl. Phys. , vol.62 , pp. 4563
- Ritter, D.¹ Weiser, K.² Zeldov, E.³

9
- 0025995170
- K. Pierz, W. Fuhs, H. Mell, Philos. Mag. B 63 (1991) 123.
- (1991) Philos. Mag. B , vol.63 , pp. 123
- Pierz, K.¹ Fuhs, W.² Mell, H.³

10
- 4243053206
- M. Stutzmann, J. Nunnenkamp, M.S. Brandt, A. Asano, Phys. Rev. Lett. 67 (1991) 2347.
- (1991) Phys. Rev. Lett. , vol.67 , pp. 2347
- Stutzmann, M.¹ Nunnenkamp, J.² Brandt, M.S.³ Asano, A.⁴

11
- 36549092854
- D.A. Doughty, A. Gallagher, J. Appl. Phys. 67 (1990) 139.
- (1990) J. Appl. Phys. , vol.67 , pp. 139
- Doughty, D.A.¹ Gallagher, A.²

12
- 0347387997
- R. Robertson, A. Gallagher, J. Appl. Phys. 59 (1986) 3402.
- (1986) J. Appl. Phys. , vol.59 , pp. 3402
- Robertson, R.¹ Gallagher, A.²

13
- 0000116833
- J. Perrin, J. Non-Cryst. Solids 137&138 (1991) 639.
- (1991) J. Non-Cryst. Solids , vol.137-138 , pp. 639
- Perrin, J.¹

14
- 0020799564
- A. Bubenzer, B. Dischler, G. Brandt, P. Koidl, J. Appl. Phys. 54 (1983) 4590.
- (1983) J. Appl. Phys. , vol.54 , pp. 4590
- Bubenzer, A.¹ Dischler, B.² Brandt, G.³ Koidl, P.⁴

15
- 0024108086
- J. Perrin, P. Roca i Cabarrocas, B. Allain, J.M. Friedt, Jpn. J. Appl. Phys. 27 (1988) 2041.
- (1988) Jpn. J. Appl. Phys. , vol.27 , pp. 2041
- Perrin, J.¹ Roca I Cabarrocas, P.² Allain, B.³ Friedt, J.M.⁴

16
- 4243075440
- C. Böhm, J. Perrin, P. Roca i Cabarrocas, J. Appl. Phys. 73 (1993) 2578.
- (1993) J. Appl. Phys. , vol.73 , pp. 2578
- Böhm, C.¹ Perrin, J.² Roca I Cabarrocas, P.³

17
- 0001603830
- K. Winer, Phys. Rev. B 41 (1990) 7952.
- (1990) Phys. Rev. B , vol.41 , pp. 7952
- Winer, K.¹

18
- 0001737275
- P. Roca i Cabarrocas, P. Morin, J. Conde, J.Z. Liu, H.R. Park, S. Wagner, J. Appl. Phys. 69 (1991) 2942.
- (1991) J. Appl. Phys. , vol.69 , pp. 2942
- Roca I Cabarrocas, P.¹ Morin, P.² Conde, J.³ Liu, J.Z.⁴ Park, H.R.⁵ Wagner, S.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.