Growth of SiGe/Si multiple quantum wells by ultra-high-vacuum electron cyclotron resonance chemical vapor deposition

Thin Solid Films

Volumn 321, Issue 1-2, 1998, Pages 111-115

  Joo, Sung Jae ^a   Yoon, Euijoon ^a   Hwang, Seok Hee ^b   Whang, Ki Woong ^b   Chun, Sang Kook ^c   Kim, Young Dong ^c  

^a Seoul National University   (South Korea)

^b Inha University   (South Korea)

^c Kyung Hee University   (South Korea)

Author keywords

Multiple quantum wells; Si1 xGex; Ultra high vacuum electron cyclotron resonance chemical vapor deposition (UHV ECRCVD)

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ULTRAHIGH VACUUM (UHV);

SEMICONDUCTOR QUANTUM WELLS;

EID: 0032064466     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00457-X     Document Type: Article

References (20)

1. S. Froyen, D.M. Wood, A. Zunger, Phys. Rev. B 36 (1987) 4547.
2. R.L. Headrick, J.-M. Baribeau, J. Vac. Sci. Technol. A 13 (1995) 782.
3. S.J. Barnett, G.T. Brown, Appl. Phys. Lett. 54 (1989) 1781.
4. B.S. Meyerson, K.J. Uram, F.K. LeGoues, Appl. Phys. Lett. 53 (1988) 2555.
5. W.-X. Ni, J. Knall, M.A. Hasan, G.V. Hansson, J.-E. Sundgren, S.A. Barnett, L.C. Markert, J.E. Greene, Phys. Rev. B 40 (1989) 10449.
6. H.-J. Gossmann, G.C. Unterwald, H.S. Luftman, J. Appl. Phys. 73 (1993) 8237.
7. H.-S. Tae, S.-H. Hwang, S.-J. Park, E. Yoon, K.-W. Whang, Appl. Phys. Lett. 64 (1994) 1021.
8. H.-S. Tae, S.-J. Park, S.-H. Hwang, K.-H. Hwang, E. Yoon, K.-W. Whang, S.A. Song, J. Vac. Sci. Technol. B 13 (1995) 908.
9. S.-J. Joo, K.-H. Hwang, S.-H. Hwang, E. Yoon, K.-W. Whang, Mater. Res. Soc. Symp. Proc. 433 (1995) 379.
10. S.-M. Jang, R. Reif, Appl. Phys. Lett. 59 (1991) 3162.
11. D.J. Robbins, J.L. Glasper, A.G. Cullis, W.Y. Leong, J. Appl. Phys. 69 (1991) 3729.
12. K.-J. Kim, M. Suemitsu, M. Yamanaka, N. Miyamoto, Appl. Phys. Lett. 62 (1993) 3461.
13. P.M. Garone, J.C. Sturm, P.V. Schwartz, S.A. Schwarz, B.J. Wilkens, Appl. Phys. Lett. 56 (1990) 1275.
14. K. Sinniah, M.G. Sherman, L.B. Lewis, W.H. Weinberg, J.T. Yates Jr., , K.C. Janda, Phys. Rev. Lett. 62 (1989) 567.
15. J. Abrefah, D.R. Orlander, Surf. Sci. 209 (1989) 291.
16. A.G. Cullis, D.J. Robbins, A.J. Pidduck, P.W. Smith, J. Cryst. Growth 123 (1992) 333.
17. A. Sakai, T. Tatsumi, Appl. Phys. Lett. 64 (1994) 52.
18. M. Copel, R.M. Tromp, Appl. Phys. Lett. 61 (1992) 1531.
19. S. Takagi, Acta Cryst. 15 (1962) 1311.
20. D. Taupin, Bull. Soc. Fr. Miner. Crystallogr. 87 (1964) 469.